Patent Assignment Details
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| Reel/Frame: | 008841/0889 | |
| Pages: | 3 |
| | Recorded: | 12/08/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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08858091
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Filing Dt:
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05/16/1997
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Title:
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METHOD AND APPARATUS FOR PURGING THE BACK SIDE OF A SUBSTRATE DURING CHEMICAL VAPOR PROCESSING
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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FISH & RICHARDSON P.C.
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JONATHAN J. WAINER
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225 FRANKLIN STREET
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BOSTON, MA 02110-2804
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