Patent Assignment Details
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| Reel/Frame: | 008883/0609 | |
| Pages: | 3 |
| | Recorded: | 12/30/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/12/1998
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Application #:
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08106768
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Filing Dt:
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07/16/1993
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Title:
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PROCESS FOR DEPOSITING A SIOX FILM HAVING REDUCED INTRINSIC STRESS AND/OR REDUCED HYDROGEN CONTENT
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BURNS, DOANE, SWECKER & MATHIS, L.L.P.
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JAMES W. PETERSON
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P.O. BOX 1404
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ALEXANDRIA, VIRGINIA 22313-1404
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