Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 008888/0024 | |
| Pages: | 3 |
| | Recorded: | 12/11/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/28/2000
|
Application #:
|
08885346
|
Filing Dt:
|
06/30/1997
|
|
Title:
|
METHOD AND APPARATUS FOR IMPROVING ETCH AND DEPOSITION UNIFORMITY IN PLASMA SEMICONDUCTOR PROCESSING
|
|
|
Assignee
|
|
|
|
|
| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
|
|
Correspondence name and address
|
| |
BURNS, DOANE, SWECKER & MATHIS
|
| |
JAMES W. PETERSON
|
| |
P.O. BOX 1404
|
| |
ALEXANDRIA, VIRGINIA 22313-1404
|
Search Results as of:
05/01/2024 11:16 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
