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Patent Assignment Details
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Reel/Frame:008957/0127   Pages: 2
Recorded: 01/09/1998
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
11/30/1999
Application #:
09005131
Filing Dt:
01/09/1998
Title:
EDGE RINSE MECHANISM FOR REMOVING A PERIPHERAL PORTION OF A RESIST FILM FORMED ON A WAFER
Assignor
1
Exec Dt:
01/09/1998
Assignee
1
7-1, SHIBA 5-CHOME MINATO-KU
TOKYO, JAPAN
Correspondence name and address
YOUNG & THOMPSON
MARY SHELTON
745 SOUTH 23RD STREET
ARLINGTON, VA 22202

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