Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 008994/0099 | |
| Pages: | 4 |
| | Recorded: | 01/29/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09015582
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Filing Dt:
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01/29/1998
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Publication #:
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Pub Dt:
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01/10/2002
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Title:
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WAFER PROCESSING APPARATUS AND METHOD, WAFER CONVEY ROBOT, SEMICONDUCTOR SUBSTRATE FABRICATION METHOD, AND SEMICONDUCTOR FABRICATION APPARATUS
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Assignee
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| 30-2, SHIMOMARUKO 3-CHOME |
| OHTA-TU, TOKYO, JAPAN |
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Correspondence name and address
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MORGAN & FINNEGAN, L.L.P.
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MICHAEL M. MURRAY
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345 PARK AVENUE
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NEW YORK, NY 10154
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