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Patent Assignment Details
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Reel/Frame:009001/0674   Pages: 3
Recorded: 02/23/1998
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/22/1999
Application #:
09028171
Filing Dt:
02/23/1998
Title:
CHARGED-PARTICLE-BEAM EXPOSURE APPARATUS AND METHODS WITH SUBSTRATE- TEMPERATURE CONTROL
Assignors
1
Exec Dt:
02/19/1998
2
Exec Dt:
02/20/1998
Assignee
1
FUJI BUILDING, 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU
TOKYO 100, JAPAN
Correspondence name and address
KLARQUIST SPARKMAN CAMPBELL ET AL.
DONALD L. STEPHENS, JR.
ONE WORLD TRADE CENTER, SUITE 1600
121 S.W. SALMON STREET
PORTLAND, OR 97204-2988

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