Patent Assignment Details
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| Reel/Frame: | 009003/0874 | |
| Pages: | 3 |
| | Recorded: | 02/26/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/15/1998
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Application #:
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08939547
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Filing Dt:
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09/29/1997
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Title:
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APPARATUS AND METHOD FOR IMPROVED WASHING AND DRYING OF SEMICONDUCTOR WAFERS
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Assignee
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| 10950 NORTH TANTAU AVENUE |
| CUPERTINO, CALIFORNIA 95014 |
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Correspondence name and address
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SIEMENS CORPORATION
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ELSA KELLER
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INTELLECTUAL PROPERTY DEPARTMENT
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186 WOOD AVENUE SOUTH
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ISELIN, NJ 08830
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