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Patent Assignment Details
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Reel/Frame:009036/0541   Pages: 3
Recorded: 03/13/1998
Conveyance: CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/02/1999
Application #:
08753645
Filing Dt:
11/27/1996
Title:
ALIGNMENT METHOD FOR MULTI-LEVEL DEEP X-RAY LITHOGRAPHY UTILIZING ALIGNMENT HOLES AND POSTS
Assignor
1
Exec Dt:
07/31/1997
Assignee
1
800 NORTH QUINCY STREET
CHIEF OF NAVAL RESEARCH, ONR OOCC
ARLINGTON, VIRGINIA 22217
Correspondence name and address
JEAN TRUMAN
CHIEF OF NAVAL RESEARCH
OFFICE OF COUNSEL
800 NORTH QUINCY STREET
ARLINGTON VA 22217-5660
Domestic representative
FRANK G. NIEMAN
OFFICE OF NAVAL RESEARCH
OFFICE OF COUNSEL
800 NORTH QUINCY STREET
ARLINGTON, VA 22217-5660

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