Patent Assignment Details
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| Reel/Frame: | 009045/0928 | |
| Pages: | 2 |
| | Recorded: | 03/17/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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09042747
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Filing Dt:
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03/17/1998
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Title:
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METHOD FOR CHARGED PARTICLE BEAM EXPOSURE WITH FIXED BARYCENTER THROUGH BALANCING STAGE SCAN
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Assignees
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| 1-1, KAMIKODANAKA, 4-CHOME NAKAHARA-KU |
| KAWASAKI-SHI, KANAGAWA, 211-8588, JAPAN |
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| 1-32-1, ASAHI-CHO, NERIMA-KU |
| TOKYO 179-0071, JAPAN |
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Correspondence name and address
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STAAS & HALSEY
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JAMES D. HALSEY, JR.
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700 ELEVENTH STREET, N.W.
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SUITE 500
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WASHINGTON, D.C. 20001
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