Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 009056/0185 | |
| Pages: | 3 |
| | Recorded: | 02/26/1998 | | |
| Conveyance: | SEE RECORDING AT REEL 9179 FRAME 0294. (RE-RECORD TO CORRECT ERRONEOUSLY ASSIGNED SERIAL NUMBER) |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/25/2000
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Application #:
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09031232
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Filing Dt:
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02/26/1998
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Title:
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BAFFLE PLATE DESIGN FOR DECREASING CONDUCTANCE LOST DURING PRECIPITATION OF POLYMER PRECURSORS IN PLASMA ETCHING CHAMBERS
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Assignee
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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Correspondence name and address
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IBM CORPORATION - DARYL K. NEFF, ESQ.
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1580 ROUTE 52
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INTELLECTUAL PROPERTY LAW, DEPT. 18G
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BLDG. 300-482, E. FISHKILL FACILITY
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HOPEWELL JUNCTION, NY 12533-6531
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