Patent Assignment Details
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| Reel/Frame: | 009086/0948 | |
| Pages: | 4 |
| | Recorded: | 01/26/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/05/2000
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Application #:
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08965892
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Filing Dt:
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11/07/1997
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Title:
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APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE
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Assignee
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| KADOMA-SHI |
| 1006 OAZA KADOMA |
| OSAKA 571, JAPAN |
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Correspondence name and address
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MCDERMOTT, WILL & EMERY
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EDWARD E. KUBASIEWICZ
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600 13TH STREET, N.W.
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WASHINGTON, DC 20005-3096
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