Patent Assignment Details
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| Reel/Frame: | 009088/0726 | |
| Pages: | 3 |
| | Recorded: | 04/08/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/28/1999
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Application #:
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09056627
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Filing Dt:
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04/08/1998
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Title:
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SINGLE-SUBSTRATE-PROCESSING APPARATUS IN SEMICONDUCTOR PROCESSING SYSTEM
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Assignee
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, ET AL.
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C. IRVIN MCCLELLAND
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VIRGINIA 22202
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