Patent Assignment Details
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| Reel/Frame: | 009128/0193 | |
| Pages: | 3 |
| | Recorded: | 01/09/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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08892865
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Filing Dt:
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07/14/1997
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Title:
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SUPPRESSION OF TUNGSTEN FILM DEPOSITION ON A SEMICONDUCTOR WAFER BEVEL EDGE WITH A HALOGENIDE PURGE GAS
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Assignee
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| P.O. BOX 450A, M/S #2061 |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY
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LEGAL AFFAIRS DEPT. - M/S 2061
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P.O. BOX 450A
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SANTA CLARA, CA 95052
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