Patent Assignment Details
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| Reel/Frame: | 009179/0628 | |
| Pages: | 3 |
| | Recorded: | 04/28/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09067618
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Filing Dt:
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04/28/1998
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Title:
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HEATER FOR USE IN SUBSTRATE PROCESSING APPARATUS TO DEPOSIT TUNGSTEN
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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TOWNSEND AND TOWNSEND AND CREW LLP
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CHUN-POK LEUNG
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TWO EMBARCADERO CENTER, 8TH FLOOR
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SAN FRANCISCO, CA 94111-3834
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