Patent Assignment Details
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Reel/Frame: | 009188/0077 | |
| Pages: | 7 |
| | Recorded: | 05/21/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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08955181
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Filing Dt:
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10/21/1997
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Title:
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TREATMENT OF ETCHING CHAMBERS USING ACTIVATED CLEANING GAS
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Assignee
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LEGAL AFFAIRS DEPARTMENT |
3050 BOWERS AVENUE, MAIL STOP 2061 |
SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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PATENT COUNSEL
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LEGAL AFFAIRS DEPARTMENT
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P.O.BOX 450A
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SANTA CLARA, CA 95052
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