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Patent Assignment Details
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Reel/Frame:009191/0334   Pages: 2
Recorded: 05/21/1998
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/07/2002
Application #:
09082583
Filing Dt:
05/21/1998
Title:
SILICON OXIDE FILM, METHOD OF FORMING THE SILICON OXIDE FILM, AND APPARATUS FOR DEPOSITING THE SILICON OXIDE FILM
Assignors
1
Exec Dt:
05/20/1998
2
Exec Dt:
05/20/1998
Assignee
1
7-1, SHIBA 5-CHOME MINATO-KU
TOKYO, JAPAN
Correspondence name and address
YOUNG & THOMPSON
MARY SHELTON
SECOND FLOOR
745 SOUTH 23RD STREET
ARLINGTON, VIRGINIA 22202

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