Patent Assignment Details
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Reel/Frame: | 009208/0645 | |
| Pages: | 2 |
| | Recorded: | 05/22/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/16/1999
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Application #:
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08996576
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Filing Dt:
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12/23/1997
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Title:
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METHOD AND APPARATUS FOR DETERMINING WAFER WARPAGE FOR OPTIMIZED ELECTROSTATIC CHUCK CLAMPING VOLTAGE
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Correspondence name and address
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SIEMENS CORPORATION
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ELSA KELLER
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INTELLECTUAL PROPERTY DEPARTMENT
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186 WOOD AVENUE SOUTH
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ISELIN, NEW JERSEY 08830
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