Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 009252/0894 | |
| Pages: | 4 |
| | Recorded: | 06/12/1998 | | |
| Conveyance: | CORRECTED ASSIGNMENT TO CORRECT THE NAME OF THE ASSIGNEE AN ASSIGNMENT WAS PREVIOUSLY RECORDED ON REEL 9048, FRAME 0558. |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09042605
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Filing Dt:
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03/16/1998
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Publication #:
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Pub Dt:
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08/02/2001
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Title:
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METHOD OF PROTECTING QUARTZ HARDWARE FROM ETCHING DURING PLASMA-ENHANCED CLEANING OF A SEMICONDUCTOR PROCESSING CHAMBER
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Assignee
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| 1109 MCKAY DRIVE |
| SAN JOSE, CALIFORNIA 95131 |
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Correspondence name and address
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WAGNER, MURABITO & HAO
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JOHN P. WAGNER, JR
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TWO NORTH MARKET, 3RD FLOOR
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SAN JOSE, CA 95113
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