Patent Assignment Details
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Reel/Frame: | 009282/0698 | |
| Pages: | 3 |
| | Recorded: | 06/29/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09040286
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Filing Dt:
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03/18/1998
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Title:
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APPARATUS FOR EMITTING A BEAM TO A SAMPLE USED FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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Assignees
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72 HORIKAWA-CHO, SAIWAI-KU |
KAWASAKI-SHI, JAPAN |
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75-1, HASUNUMA-CHO, ITABASHI-KU |
TOKYO, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, ET AL., P.C.
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MARVIN J. SPIVAK
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ATTORNEYS AT LAW
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1755 JEFFERSON DAVIS HIGHWAY, FOURTH FL.
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ARLINGTON, VIRGINIA 22202
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