Patent Assignment Details
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| Reel/Frame: | 009312/0214 | |
| Pages: | 7 |
| | Recorded: | 07/10/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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09113450
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Filing Dt:
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07/10/1998
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Title:
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TEMPERATURE REGULATION IN A CMP PROCESS
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Assignee
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| 830 STEWART DRIVE |
| SUNNYVALE, CALIFORNIA 94086 |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON, ET AL.
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EDWARD C. KWOK
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25 METRO DRIVE
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SUITE 700
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SAN JOSE, CA 95110
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