Patent Assignment Details
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Reel/Frame: | 009341/0367 | |
| Pages: | 2 |
| | Recorded: | 07/13/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09059434
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Filing Dt:
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04/14/1998
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Title:
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METHOD OF MEASURING IMAGE-FORMING ERROR OF PROJECTION OPTICAL SYSTEM, METHOD OF MANUFACTURING EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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FUJI BLDG., 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
TOKYO, JAPAN 100-8 |
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Correspondence name and address
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FOLEY & LARDNER
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RICHARD LINN
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3000 K STREET, N.W.
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SUITE 500
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WASHINGTON, D.C. 20007-5109
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