Patent Assignment Details
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| Reel/Frame: | 009389/0822 | |
| Pages: | 3 |
| | Recorded: | 08/07/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09131113
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Filing Dt:
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08/07/1998
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Title:
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MULTI-ELEMENT DEFLECTION ABERRATION CORRECTION FOR ELECTRON BEAM LITHOGRAPHY
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Assignee
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| 6-3, NISHI-OHI 1-CHOME, SHINAGAWA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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WHITHAM, CURTIS & WHITHAM
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MICHAEL E. WHITHAM
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RESTON INTERNATIONAL CENTER
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11800 SUNRISE VALLEY DRIVE, SUITE 900
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RESTON, VIRGINIA 20191
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