Patent Assignment Details
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| Reel/Frame: | 009401/0838 | |
| Pages: | 3 |
| | Recorded: | 08/24/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09087848
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Filing Dt:
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06/01/1998
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Title:
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SEMICONDUCTOR PROCESSING METHOD AND SYSTEM USING C5F8
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Assignee
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| MINATO-KU |
| TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME |
| TOKYO 107, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND ET AL.
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STEVEN P. WEIHROUCH
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VA 22202
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