Patent Assignment Details
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Reel/Frame: | 009402/0532 | |
| Pages: | 2 |
| | Recorded: | 08/19/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/20/1999
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Application #:
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09136704
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Filing Dt:
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08/19/1998
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Title:
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METHOD AND APPARATUS FOR CONTROLLING BACKSIDE PRESSURE DURING CHEMICAL MECHANICAL POLISHING
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Assignee
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SCIENCE-BASED INDUSTRIAL PARK |
NO. 19 LI-HSIN ROAD |
HSINCHU, TAIWAN R.O.C |
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Correspondence name and address
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CHRISTENSEN O'CONNOR JOHNSON, ET AL
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CHUN M. NG, ESQ.
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1420 FIFTH AVE.
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SUITE 2800
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SEATTLE, WA 98101-2347
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