Patent Assignment Details
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| Reel/Frame: | 009419/0653 | |
| Pages: | 4 |
| | Recorded: | 08/28/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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09141902
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Filing Dt:
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08/28/1998
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Title:
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METHOD TO CLEAN SUBSTRATE AND IMPROVE PHOTORESIST PROFILE
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Assignee
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| PO BOX 6 |
| 8000 S FEDERAL WAY |
| BOISE, UNITED STATES 83706 |
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Correspondence name and address
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DICKSTEIN SHAPIRO MORIN & OSHINSKY LLP
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JUNE LAZAR
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2101 L STREET, N.W.
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WASHINGTON, DC 20037
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