Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 009453/0180 | |
| Pages: | 3 |
| | Recorded: | 09/10/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
3
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Patent #:
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Issue Dt:
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07/06/1993
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Application #:
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07793509
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Filing Dt:
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11/18/1991
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Title:
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HEAT PROCESS DEVICE
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Patent #:
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Issue Dt:
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09/28/1993
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Application #:
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07864185
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Filing Dt:
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04/03/1992
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Title:
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INDIRECT TEMPERATURE MEASUREMENT OF FILMS FORMED ON SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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08/29/1995
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Application #:
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08145663
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Filing Dt:
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11/04/1993
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Title:
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PROCESSING APPARATUS WITH A GAS DISTRIBUTOR HAVING BACK AND FORTH PARALLEL MOVEMENT RELATIVE TO A WORKPIECE SUPPORT SURFACE
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Assignee
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| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, ET AL.
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MARVIN J. SPIVAK
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VA 22202
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