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Total properties:
59
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Patent #:
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|
Issue Dt:
|
03/20/1990
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Application #:
|
07236848
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Filing Dt:
|
08/26/1988
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Title:
|
EXPOSURE METHOD AND APPARATUS THEREFOR
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Patent #:
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|
Issue Dt:
|
01/15/1991
|
Application #:
|
07308470
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Filing Dt:
|
02/10/1989
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Title:
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APPARATUS FOR COATING A PHOTO-RESIST FILM AND/OR DEVELOPING IT AFTER BEING EXPOSED
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|
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Patent #:
|
|
Issue Dt:
|
02/13/1990
|
Application #:
|
07332969
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Filing Dt:
|
04/04/1989
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Title:
|
COATING DEVICE
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Patent #:
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|
Issue Dt:
|
03/26/1991
|
Application #:
|
07357279
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Filing Dt:
|
05/26/1989
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Title:
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COATING APPARATUS AND METHOD FOR APPLYING A LIQUID TO A SEMICONDUCTOR WAFER, INCLUDING SELECTING A NOZZLE IN A STAND-BY STATE
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Patent #:
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|
Issue Dt:
|
10/29/1991
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Application #:
|
07442535
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Filing Dt:
|
11/28/1989
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|
Title:
|
RESIST PROCESS APPARATUS
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|
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Patent #:
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Issue Dt:
|
12/10/1991
|
Application #:
|
07472813
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Filing Dt:
|
01/31/1990
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Title:
|
COATING APPARATUS
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|
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Patent #:
|
|
Issue Dt:
|
07/02/1991
|
Application #:
|
07480005
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Filing Dt:
|
02/14/1990
|
|
Title:
|
EXPOSURE APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/07/1992
|
Application #:
|
07525681
|
Filing Dt:
|
05/21/1990
|
|
Title:
|
LIQUID COATING DEVICE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/29/1992
|
Application #:
|
07538710
|
Filing Dt:
|
06/15/1990
|
|
Title:
|
METHOD FOR HEAT-PROCESSING SEMICONDUCTOR DEVICE AND APPARATUS FOR THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/30/1991
|
Application #:
|
07579251
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Filing Dt:
|
09/05/1990
|
|
Title:
|
PROCESSING LIQUID SUPPLY UNIT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/18/1992
|
Application #:
|
07585199
|
Filing Dt:
|
09/20/1990
|
|
Title:
|
COATING APPARATUS AND METHOD FOR APPLYING A LIQUID TO A SEMICONDUCTOR WAFER INCLUDING SELECTING A NOZZLE ON A STAND BY STATE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/05/1993
|
Application #:
|
07627357
|
Filing Dt:
|
12/14/1990
|
|
Title:
|
APPARATUS FOR COATING A PHOTO-RESIST FILM AND/OR DEVELOPING IT AFTER BEING EXPOSED
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/05/1993
|
Application #:
|
07755781
|
Filing Dt:
|
09/06/1991
|
|
Title:
|
COATING APPARATUS WITH NOZZLE MOVING MEANS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/25/1993
|
Application #:
|
07791137
|
Filing Dt:
|
11/13/1991
|
|
Title:
|
TREATMENT APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/13/1993
|
Application #:
|
07795762
|
Filing Dt:
|
11/21/1991
|
|
Title:
|
WASHING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/29/1994
|
Application #:
|
07834819
|
Filing Dt:
|
02/13/1992
|
|
Title:
|
TRANSPORTATION-TRANSFER DEVICE FOR AN OBJECT OF TREATMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/19/1993
|
Application #:
|
07865766
|
Filing Dt:
|
04/10/1992
|
|
Title:
|
COATING METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/05/1994
|
Application #:
|
07872360
|
Filing Dt:
|
04/23/1992
|
|
Title:
|
CLEANING DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/06/1996
|
Application #:
|
07880068
|
Filing Dt:
|
05/07/1992
|
|
Title:
|
WASHING APPARATUS, AND WASHING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/30/1993
|
Application #:
|
07880543
|
Filing Dt:
|
05/08/1992
|
|
Title:
|
CLEANING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/13/1993
|
Application #:
|
07904505
|
Filing Dt:
|
06/25/1992
|
|
Title:
|
RESIST PROCESS SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/30/1993
|
Application #:
|
07917975
|
Filing Dt:
|
07/24/1992
|
|
Title:
|
SUBSTRATE DETECTOR WITH LIGHT EMITTING AND RECEIVING ELEMET ARRANGED IN A STAGGERED FASHION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/19/1993
|
Application #:
|
07935400
|
Filing Dt:
|
08/26/1992
|
|
Title:
|
TRANSFER APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/28/1993
|
Application #:
|
07935460
|
Filing Dt:
|
08/26/1992
|
|
Title:
|
DRIVING DEVICE HAVING SEALING MECHANISM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/04/1994
|
Application #:
|
07988797
|
Filing Dt:
|
12/10/1992
|
|
Title:
|
LIQUID SUPPLY APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/15/1994
|
Application #:
|
08014161
|
Filing Dt:
|
02/05/1993
|
|
Title:
|
APPARATUS FOR PROCESSING WAFER-SHAPED SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/12/1994
|
Application #:
|
08026016
|
Filing Dt:
|
03/04/1993
|
|
Title:
|
PROCESSING VESSEL FOR A WAFER WASHING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/1994
|
Application #:
|
08026771
|
Filing Dt:
|
03/05/1993
|
|
Title:
|
WASHING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/1994
|
Application #:
|
08031464
|
Filing Dt:
|
03/15/1993
|
|
Title:
|
RESIST PROCESSING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/1995
|
Application #:
|
08043731
|
Filing Dt:
|
04/07/1993
|
|
Title:
|
SPINDRIER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/1994
|
Application #:
|
08046986
|
Filing Dt:
|
04/16/1993
|
|
Title:
|
SPINDRIER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/27/1994
|
Application #:
|
08062536
|
Filing Dt:
|
05/18/1993
|
|
Title:
|
DEVICE HAVING BRUSH FOR SCRUBBING SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/13/1994
|
Application #:
|
08069106
|
Filing Dt:
|
05/28/1993
|
|
Title:
|
DEVICE AND METHOD FOR SCRUBBING AND CLEANING SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/16/1995
|
Application #:
|
08093699
|
Filing Dt:
|
07/20/1993
|
|
Title:
|
METHOD FOR APPLYING PROCESS SOLUTION TO SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/1994
|
Application #:
|
08105166
|
Filing Dt:
|
08/12/1993
|
|
Title:
|
SUBSTRATE DETECTOR WITH LIGHT EMITTING AND RECEIVING ELEMENTS ARRANGED IN STAGGERED FASHION AND A POLARIZATION FILTER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/06/1994
|
Application #:
|
08111006
|
Filing Dt:
|
08/24/1993
|
|
Title:
|
SUBSTRATE DRYING APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/1994
|
Application #:
|
08111473
|
Filing Dt:
|
08/25/1993
|
|
Title:
|
CLEANING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/08/1994
|
Application #:
|
08130464
|
Filing Dt:
|
10/01/1993
|
|
Title:
|
CLEANING APPARATUS FOR CLEANING REVERSE SURFACE OF SEMICONDUCTOR WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/28/1995
|
Application #:
|
08136373
|
Filing Dt:
|
10/15/1993
|
|
Title:
|
METHOD AND APPARATUS FOR HYDROPHOBIC TREATMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/11/1995
|
Application #:
|
08138077
|
Filing Dt:
|
10/20/1993
|
|
Title:
|
APPARATUS AND METHOD USING OPTICAL SENSORS RECESSRD IN CHANNEL WALLS FOR DETECTING SUBSTRATES IN A SUPPORT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/1994
|
Application #:
|
08140985
|
Filing Dt:
|
10/25/1993
|
|
Title:
|
TRANSFER APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/1995
|
Application #:
|
08171643
|
Filing Dt:
|
12/22/1993
|
|
Title:
|
APPARATUS AND METHOD FOR DRYING SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/1995
|
Application #:
|
08183971
|
Filing Dt:
|
01/21/1994
|
|
Title:
|
APPARATUS FOR CLEANING CONVEYOR CHUCK
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/03/1996
|
Application #:
|
08186879
|
Filing Dt:
|
01/26/1994
|
|
Title:
|
COATING APPARATUS AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/1995
|
Application #:
|
08197285
|
Filing Dt:
|
02/16/1994
|
|
Title:
|
WAFER DRYING APPARATUS AND FIRE-EXTINGUISHING METHOD THEREFOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/1995
|
Application #:
|
08229675
|
Filing Dt:
|
04/19/1994
|
|
Title:
|
SPIN CHUCK AND TREATMENT APPARATUS USING SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/07/1996
|
Application #:
|
08258206
|
Filing Dt:
|
06/10/1994
|
|
Title:
|
HEAT TREATMENT DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/15/1996
|
Application #:
|
08262329
|
Filing Dt:
|
06/17/1994
|
|
Title:
|
SEMICONDUCTOR TREATMENT SYSTEM AND METHOD FOR EXCHANGING AND TREATING SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/21/1996
|
Application #:
|
08267542
|
Filing Dt:
|
06/29/1994
|
|
Title:
|
A METHOD FOR SCRUBBING AND CLEANING SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/1995
|
Application #:
|
08271675
|
Filing Dt:
|
07/07/1994
|
|
Title:
|
RESIST PROCESSING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/15/1996
|
Application #:
|
08286173
|
Filing Dt:
|
08/05/1994
|
|
Title:
|
SEMICONDUCTOR PROCESS SYSTEM AND POSITIONING METHOD AND APPARATUS FOR TRANSFER MECHANISM THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/09/1996
|
Application #:
|
08292284
|
Filing Dt:
|
08/18/1994
|
|
Title:
|
CLEANING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/09/1996
|
Application #:
|
08312080
|
Filing Dt:
|
09/26/1994
|
|
Title:
|
TRANSFER APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/19/1996
|
Application #:
|
08330793
|
Filing Dt:
|
10/28/1994
|
|
Title:
|
SUBSTRATE DRYING APPARATUS AND SUBSTRATE DRYING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/15/1996
|
Application #:
|
08331083
|
Filing Dt:
|
10/28/1994
|
|
Title:
|
APPARATUS FOR PROCESSING SUBSTRATES HAVING A FILM FORMED ON A SURFACE OF THE SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/21/1996
|
Application #:
|
08336213
|
Filing Dt:
|
11/04/1994
|
|
Title:
|
DOUBLE-SIDED SUBSTRATE CLEANING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/26/1996
|
Application #:
|
08376393
|
Filing Dt:
|
01/23/1995
|
|
Title:
|
METHOD AND APPARATUS FOR HYDROPHOBIC TREATMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/24/1995
|
Application #:
|
08403138
|
Filing Dt:
|
03/13/1995
|
|
Title:
|
METHOD FOR PROCESSING WAFER-SHAPED SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/26/1996
|
Application #:
|
08574732
|
Filing Dt:
|
12/19/1995
|
|
Title:
|
SYSTEM FOR APPLYING PROCESS LIQUID
|
|
