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Total properties:
21
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Patent #:
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Issue Dt:
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08/19/1997
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Application #:
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08217636
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Filing Dt:
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03/25/1994
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Title:
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METHOD OF FORMING COATING FILM AND APPARATUS THEREFOR
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Patent #:
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Issue Dt:
|
09/09/1997
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Application #:
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08246266
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Filing Dt:
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05/19/1994
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Title:
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COMMUNICATION SYSTEM USED IN SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT
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Patent #:
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Issue Dt:
|
05/06/1997
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Application #:
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08400935
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Filing Dt:
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03/09/1995
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Title:
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RESIST PROCESSING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
|
02/17/1998
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Application #:
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08416369
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Filing Dt:
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04/04/1995
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Title:
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RESIST PROCESSING APPARATUS FOR A RECTANGULAR SUBSTRATE
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Patent #:
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Issue Dt:
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09/08/1998
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Application #:
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08427871
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Filing Dt:
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04/26/1995
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Title:
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RESIST PROCESSING APPARATUS HAVING AN INTERFACE SECTION INCLUDING TWO STACKED SUBSTANCE WAITING TABLES
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Patent #:
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Issue Dt:
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06/10/1997
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Application #:
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08439570
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Filing Dt:
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05/11/1995
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Title:
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CLEANING APPARATUS AND CLEANING METHOD
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
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08496319
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Filing Dt:
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06/29/1995
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Title:
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SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
|
12/09/1997
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Application #:
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08512018
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Filing Dt:
|
08/07/1995
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Title:
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METHOD OF FORMING A COATING FILM
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Patent #:
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Issue Dt:
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11/18/1997
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Application #:
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08521845
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Filing Dt:
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08/31/1995
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Title:
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APPARATUS FOR DEVELOPING A RESIST-COATED SUBSTRATE
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08524522
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Filing Dt:
|
09/07/1995
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|
Title:
|
SUBSTRATE PROCESSING APPARATUS
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|
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Patent #:
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|
Issue Dt:
|
12/09/1997
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Application #:
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08527336
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Filing Dt:
|
09/12/1995
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Title:
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PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/30/1997
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Application #:
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08533396
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Filing Dt:
|
09/25/1995
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Title:
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COATING APPARATUS
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|
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Patent #:
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Issue Dt:
|
04/29/1997
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Application #:
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08535895
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Filing Dt:
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09/28/1995
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Title:
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APPARATUS AND METHOD FOR DEVELOPING RESIST COATED ON A SUBSTRATE
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Patent #:
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Issue Dt:
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04/15/1997
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Application #:
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08538589
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Filing Dt:
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10/03/1995
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Title:
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METHOD AND APPARATUS FOR HEAT-TREATING SUBSTRATE
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Patent #:
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Issue Dt:
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10/06/1998
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Application #:
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08548151
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Filing Dt:
|
10/25/1995
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Title:
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SUBSTRATE HEAT TREATMENT TABLE APPARATUS
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|
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Patent #:
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Issue Dt:
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09/30/1997
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Application #:
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08560708
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Filing Dt:
|
11/20/1995
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Title:
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WASHING APPARATUS, AND WASHING METHOD
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Patent #:
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Issue Dt:
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04/15/1997
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Application #:
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08580430
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Filing Dt:
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12/27/1995
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Title:
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TRANSFER APPARATUS
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|
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Patent #:
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Issue Dt:
|
11/11/1997
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Application #:
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08597536
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Filing Dt:
|
02/02/1996
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|
Title:
|
RESIST TREATING METHOD
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|
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Patent #:
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|
Issue Dt:
|
06/02/1998
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Application #:
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08639748
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Filing Dt:
|
04/29/1996
|
|
Title:
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RESIST PROCESSING METHOD AND APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
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02/08/2000
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Application #:
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08761520
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Filing Dt:
|
12/09/1996
|
|
Title:
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SUBSTRATE TRANSFERRING DEVICE
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|
|
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Patent #:
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Issue Dt:
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07/21/1998
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Application #:
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08789537
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Filing Dt:
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01/27/1997
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Title:
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METHOD FOR WASHING OBJECTS
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