Patent Assignment Details
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| Reel/Frame: | 009469/0426 | |
| Pages: | 3 |
| | Recorded: | 09/18/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/26/2000
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Application #:
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09156339
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Filing Dt:
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09/18/1998
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Title:
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CLOSED-LOOP CONTROLLED APPARATUS AND METHOD FOR PREVENTING CHAMBER CONTAMINATION
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Assignee
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| NO. 121 PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C |
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Correspondence name and address
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TUNG & ASSOCIATES
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RANDY W. TUNG
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838 W. LONG LAKE ROAD
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SUITE 120
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BLOOMFIELD HILLS, MICHIGAN 48302
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