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Patent Assignment Details
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Reel/Frame:009669/0551   Pages: 2
Recorded: 12/22/1998
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/22/2003
Application #:
09217941
Filing Dt:
12/22/1998
Title:
MULTI-ELECTRON BEAM EXPOSURE METHOD AND APPARATUS AND DEVICE MANUFACTURING METHOD
Assignor
1
Exec Dt:
12/14/1998
Assignee
1
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU
TOKYO, JAPAN
Correspondence name and address
FITZPATRICK, CELLA, HARPER & SCINTO
STEVEN E. WARNER
30 ROCKEFELLER PLAZA
NEW YORK, NEW YORK 10112-3801

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