Patent Assignment Details
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Reel/Frame: | 009694/0973 | |
| Pages: | 4 |
| | Recorded: | 12/28/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/16/2002
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Application #:
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09220690
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Filing Dt:
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12/28/1998
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Publication #:
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Pub Dt:
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02/07/2002
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Title:
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METHOD OF CLEANING SUBSTRATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignees
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MITA 3-CHOME, MINATO-KU |
TOKYO 108-0073, JAPAN |
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13-29, KONAN 2-CHOME, MINATO-KU |
TOKYO 108-0075, JAPAN |
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Correspondence name and address
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LORUSSO & LOUD
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GEORGE A. LOUD
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3137 MT. VERNON AVENUE
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ALEXANDRIA, VA 22305
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