Patent Assignment Details
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| Reel/Frame: | 009699/0616 | |
| Pages: | 3 |
| | Recorded: | 01/08/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/05/2002
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Application #:
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09227395
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Filing Dt:
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01/08/1999
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Title:
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VOLTAGE CONTRAST METHOD AND APPARATUS FOR SEMICONDUCTOR INSPECTION USING LOW VOLTAGE PARTICLE BEAM
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Assignee
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| 1601 TECHNOLOGY DRIVE |
| SAN JOSE, CALIFORNIA 95110 |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON ET AL.
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ELAINE H. LO
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25 METRO DRIVE, SUITE 700
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SAN JOSE, CA 95110
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