Patent Assignment Details
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| Reel/Frame: | 009701/0588 | |
| Pages: | 2 |
| | Recorded: | 01/11/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09228233
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Filing Dt:
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01/11/1999
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Title:
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PLASMA PROCESSING APPARATUS CAPABLE OF RELIABLY, ELECTROSTATICALLY ATTRACTING AND HOLDING AND THUS FIXING SEMICONDUCTOR WAFER AND ELECTROSTATIC ATTRACT-AND-HOLD VACUUM CHUCKING METHOD EMPLOYED IN THE SAME
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Assignee
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| 2-3 MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO 100-8310, JAPAN |
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Correspondence name and address
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MCDERMOTT, WILL & EMERY
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STEPHEN A. BECKER
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600 13TH STREET, N.W.
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WASHINGTON, DC 20005
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