Patent Assignment Details
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| Reel/Frame: | 009744/0692 | |
| Pages: | 2 |
| | Recorded: | 02/02/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/04/2002
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Application #:
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09241576
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Filing Dt:
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02/02/1999
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Title:
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CHARGED-PARTICLE BEAM LITHOGRAPHY APPARATUS AND SYSTEM CAPABLE OF READILY DETECTING ABNORMALITY IN CONTROLLING ON-OFF OPERATION
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Assignee
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| 1-32-1, ASAHI-CHO, NERIMA-KU |
| TOKYO, 179-0071, JAPAN |
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Correspondence name and address
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CHRISTIE, PARKER & HALE, LLP
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D. BRUCE PROUT
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P.O. BOX 7068
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PASADENA CA 91109-7068
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