Patent Assignment Details
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| Reel/Frame: | 009795/0761 | |
| Pages: | 3 |
| | Recorded: | 03/08/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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09222338
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Filing Dt:
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12/28/1998
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Title:
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CHARGED-PARTICLE-BEAM EXPOSURE METHODS WITH BEAM PARALLELISM DETECTION AND CORRECTION
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Assignee
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| FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN CAMBELL LEIGH ET AL
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DONALD L. STEPHENS JR.
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ONE WORLD TRADE CENTER, SUITE 1600
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121 S.W. SALMON STREET
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PORTLAND, OREGON 97204-2988
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