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Patent Assignment Details
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Reel/Frame:009805/0263   Pages: 3
Recorded: 02/22/1999
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
10/14/2003
Application #:
09225825
Filing Dt:
01/05/1999
Publication #:
Pub Dt:
02/13/2003
Title:
METHOD AND APPARATUS FOR MONITORING AND CONTROLLING WAFER FABRICATION PROCESS
Assignors
1
Exec Dt:
02/11/1999
2
Exec Dt:
02/11/1999
3
Exec Dt:
02/12/1999
Assignee
1
P.O. BOX 450-A
SANTA CLARA, CALIFORNIA 95052
Correspondence name and address
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
PATENT COUNSEL
P.O. BOX 450-A
SANTA CLARA, CALIFORNIA 95052

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