Patent Assignment Details
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| Reel/Frame: | 009810/0644 | |
| Pages: | 2 |
| | Recorded: | 02/22/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09253547
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Filing Dt:
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02/22/1999
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Title:
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METHOD FOR MEASURING THE POSITIONS OF STRUCTURES ON A MASK SURFACE
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Assignee
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| ERNST-LEITZ-STRASSE |
| 35578 WETZLAR, GERMANY |
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Correspondence name and address
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EVENSON, MCKEOWN, EDWARDS ET AL
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JEFFREY D. SANOK
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1200 G STREET, N.W.
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SUITE 700
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WASHINGTON, D.C. 20005
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