Patent Assignment Details
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| Reel/Frame: | 009849/0658 | |
| Pages: | 3 |
| | Recorded: | 03/16/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09270449
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Filing Dt:
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03/16/1999
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Title:
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OPTICAL SYSTEM FOR CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY APPARATUS EXHIBITING REDUCED THIRD-AND FIFTH-ORDER ABERRATIONS
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Assignee
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| FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN ET AL
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DONALD L. STEPHENS JR.
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121 S.W. SALMON STREET
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1 WORLD TRADE CENTER SUITE 1600
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PORTLAND, OR 97204-2988
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