Patent Assignment Details
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| Reel/Frame: | 009864/0460 | |
| Pages: | 3 |
| | Recorded: | 03/30/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09281602
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Filing Dt:
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03/29/1999
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Title:
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PLASMA CLEANING PROCESS FOR OPENINGS FORMED IN AT LEAST ONE LOW DIELECTRIC CONSTANT INSULATION LAYER OVER COPPER METALLIZATION IN INTEGRATED CIRCUIT STRUCTURES
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Assignee
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| 1551 MCCARTHY BOULEVARD |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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LSI LOGIC CORPORATION
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RALPH R. VESELI, PATENT ATTORNEY
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IP LAW DEPT., M/S D-106
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1551 MCCARTHY BOULEVARD
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MILPITAS, CA 95035
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