Patent Assignment Details
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Reel/Frame: | 009868/0888 | |
| Pages: | 4 |
| | Recorded: | 03/29/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09280439
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Filing Dt:
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03/29/1999
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Title:
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METHOD AND APPARATUS FOR STABILIZING THE PROCESS TEMPERATURE DURING CHEMICAL MECHANICAL POLISHING
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BLAKELY SOKOLOFF TAYLOR & ZAFMAN, LLP
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WILLIAM W. KIDD
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12400 WILSHIRE BOULEVARD
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SEVENTH FLOOR
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LOS ANGELES, CA 90025
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