Patent Assignment Details
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| Reel/Frame: | 009869/0562 | |
| Pages: | 3 |
| | Recorded: | 03/26/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09280024
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Filing Dt:
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03/26/1999
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Title:
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CHEMICAL VAPOR DEPOSITION SYSTEM WITH REDUCED MATERIAL DEPOSITION ON CHAMBER WALL SURFACES
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Assignee
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| A CORPORATION OF JAPAN |
| 7-10 HAKUSHIMA 2-CHOME |
| MINOO-SHI, OSAKA, JAPAN |
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Correspondence name and address
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MARSHALL & MELHORN
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PHILLIP S. OBERLIN
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FOUR SEAGATE - 8TH FLOOR
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TOLEDO, OHIO 43604
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Domestic representative
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MARSHALL & MELHORN
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FOUR SEAGATE - 8TH FLOOR
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TOLEDO, OH 43604
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