Patent Assignment Details
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Reel/Frame: | 009870/0038 | |
| Pages: | 5 |
| | Recorded: | 04/21/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/13/2001
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Application #:
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09264990
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Filing Dt:
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04/21/1998
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Title:
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METHOD AND APPARATUS FOR MODIFYING THE PROFILE OF NARROW, HIGH-ASPECT-RATIO GAPS USING DIFFERENTIAL PLASMA POWER
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Assignee
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P.O. BOX 450A |
LEGAL AFFAIRS DEPT. |
SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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SCOTT W. HEWETT
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LEGAL AFFAIRS DEPT.
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P.O. BOX 450A, M/S 2061
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SANTA CLARA, CA 95052
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