Patent Assignment Details
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| Reel/Frame: | 009905/0719 | |
| Pages: | 4 |
| | Recorded: | 04/13/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/18/2000
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Application #:
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09115687
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Filing Dt:
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07/15/1998
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Title:
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APPARATUS AND METHOD FOR INSPECTING LOADING STATE OF WAFERS IN CARRIER
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Assignee
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| P.O. BOX 36 |
| PRINCETON UNIVERSITY, 5 NEW SOUTH BUILDING |
| PRINCETON, NEW JERSEY 08544 |
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Correspondence name and address
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PEPPER HAMILTON LLP
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600 FOURTEENTH STREET, NW
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WASHINGTON, DC 20005-2004
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