Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 009910/0336 | |
| Pages: | 3 |
| | Recorded: | 04/14/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/30/2003
|
Application #:
|
09212975
|
Filing Dt:
|
12/16/1998
|
|
Title:
|
CHARGED-PARTICLE-BEAM MASK-BASED EXPOSURE APPARATUS EMPLOYING A VARIABLE MASK-ILLUMINATION FIELD AND ALIGNMENT AND CALIBRATION METHODS THEREFOR
|
|
|
Assignee
|
|
|
|
|
| 2-3, MARUNOUCHI 3-CHOME |
| FUJI BUILDING |
| CHIYODA-KU TOKYO 100, JAPAN |
|
|
Correspondence name and address
|
| |
KLARQUIST SPARKMAN ET AL
|
| |
GREGORY V. BEAN
|
| |
ONE WORLD TRADE CENTER
|
| |
121 S. W. SALMON STREET
|
| |
PORTLAND, OREGON 97024-2988
|
Search Results as of:
05/07/2024 06:34 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
