Patent Assignment Details
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| Reel/Frame: | 009987/0282 | |
| Pages: | 2 |
| | Recorded: | 05/21/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/06/1997
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Application #:
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08044869
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Filing Dt:
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04/08/1993
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Title:
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PLASMA ETCH PROCESS AND TISIX LAYERS MADE USING THE PROCESS
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Assignee
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| ATTENTION: LEGAL DEPARTMENT |
| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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NOVELLUS SYSTEMS, INC., MAILSTOP 280
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ROLAND TSO
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4000 NORTH FIRST STREET
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SAN JOSE, CA 95134
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