Patent Assignment Details
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| Reel/Frame: | 010009/0180 | |
| Pages: | 2 |
| | Recorded: | 06/01/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09323010
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Filing Dt:
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06/01/1999
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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MULTIPLE NUMERICAL APERTURE ELECTRON BEAM PROJECTION LITHOGRAPHY SYSTEM
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Assignee
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| OHI PLANT, 6-3, NISHI-OHI 1-CHOME |
| SHINAGAWA-KU, TOKYO, JAPAN 140-6 |
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Correspondence name and address
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WHITHAM, CURTIS & WHITHAM
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MARSHALL M. CURTIS
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RESTON INTERNATIONAL CENTER
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11800 SUNRISE VALLEY DRIVE - SUITE 900
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RESTON, VIRGINIA 20191
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