Patent Assignment Details
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| Reel/Frame: | 010015/0567 | |
| Pages: | 3 |
| | Recorded: | 05/27/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09320451
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Filing Dt:
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05/27/1999
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Title:
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METHOD OF CLEANING FILM FORMING APPARATUS, CLEANING SYSTEM FOR CARRYING OUT THE SAME AND FILM FORMING SYSTEM
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Assignee
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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Correspondence name and address
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SMITH, GAMBRELL & RUSSELL, LLP
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BEVERIDGE, DEGRANDI, WEILACHER & YOUNG
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INTELLECTUAL PROPERTY GROUP
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1850 M STREET NW, SUITE 800
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WASHINGTON, DC 20036
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