Patent Assignment Details
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| Reel/Frame: | 010237/0487 | |
| Pages: | 3 |
| | Recorded: | 09/17/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/20/2000
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Application #:
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09313233
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Filing Dt:
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05/17/1999
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Title:
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TEMPERATURE CONTROL CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING PROCESS
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Assignee
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| LEGAL DEPARTMENT, MS/45 |
| 1109 MCKAY DRIVE |
| SAN JOSE, CALIFORNIA 95131 |
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Correspondence name and address
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DOUGLAS L. WELLER
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431 MAGNOLIA LANE
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SANTA CLARA, CA 95051
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