Patent Assignment Details
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Reel/Frame: | 010287/0606 | |
| Pages: | 3 |
| | Recorded: | 09/30/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09409185
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Filing Dt:
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09/30/1999
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Publication #:
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Pub Dt:
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03/07/2002
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Title:
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LOW LEAKAGE CURRENT SILICON CARBONITRIDE PREPARED USING METHANE, AMMONIA AND SILANE FOR COPPER DIFFUSION BARRIER, ETCHSTOP AND PASSIVATION APPLICATIONS
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Assignee
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON, ET AL.
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TOM CHEN
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25 METRO DRIVE, SUITE 700
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SAN JOSE, CA 95110
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