Patent Assignment Details
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| Reel/Frame: | 010334/0375 | |
| Pages: | 5 |
| | Recorded: | 10/25/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/09/2002
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Application #:
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09390142
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Filing Dt:
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09/03/1999
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Title:
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APPARATUS AND METHOD FOR CHEMICAL-MECHANICAL POLISHING (CMP) HEAD HAVING DIRECT PNEUMATIC WAFER POLISHING PRESSURE
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Assignee
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| 1-5-1 OHTEMACHI, CHIYODA-KU |
| TOKYO, JAPAN 100-8 |
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Correspondence name and address
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FLEHR HOHBACH TEST, ET AL.
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R. MICHAEL ANANIAN
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4 EMBARCADERO CENTER #3400
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SAN FRANCISCO, CA 94111
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